Characteristics of HfAlO high-k dielectric as a barrier to oxygen and germanium diffusion on strained SiGe

K.K. Curreem, P.F. Lee, Jiyan Dai

Research output: Unpublished conference presentation (presented paper, abstract, poster)Conference presentation (not published in journal/proceeding/book)Academic researchpeer-review

Original languageEnglish
Publication statusPublished - 2006
EventE-MRS Spring Meeting -
Duration: 1 Jan 2006 → …


ConferenceE-MRS Spring Meeting
Period1/01/06 → …

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