| Original language | English |
|---|---|
| Publication status | Published - 2006 |
| Event | E-MRS Spring Meeting - Duration: 1 Jan 2006 → … |
Conference
| Conference | E-MRS Spring Meeting |
|---|---|
| Period | 1/01/06 → … |
Characteristics of HfAlO high-k dielectric as a barrier to oxygen and germanium diffusion on strained SiGe
K.K. Curreem, P.F. Lee, Jiyan Dai
Research output: Unpublished conference presentation (presented paper, abstract, poster) › Conference presentation (not published in journal/proceeding/book) › Academic research › peer-review