Characteristics of BaxSr1-xTiO3thin films grown by pulsed laser ablation of rotating split targets of BaTiO3and SrTiO3

  • V. Ruckenbauer
  • , F. F. Hau
  • , S. G. Lu
  • , K. M. Yeung
  • , Chee Leung Mak
  • , K. H. Wong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

13 Citations (Scopus)

Abstract

We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.
Original languageEnglish
Pages (from-to)1049-1052
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume78
Issue number7
DOIs
Publication statusPublished - 1 Jan 2004

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science

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