Characteristics of BaxSr1-xTiO3thin films grown by pulsed laser ablation of rotating split targets of BaTiO3and SrTiO3

V. Ruckenbauer; F. F. Hau; S. G. Lu; K. M. Yeung; Chee Leung Mak; K. H. Wong

doi:10.1007/s00339-003-2154-0

Characteristics of Ba_xSr_1-xTiO₃thin films grown by pulsed laser ablation of rotating split targets of BaTiO₃and SrTiO₃

V. Ruckenbauer, F. F. Hau, S. G. Lu, K. M. Yeung, Chee Leung Mak, K. H. Wong

Research output: Journal article publication › Journal article › Academic research › peer-review

12 Citations (Scopus)

Abstract

We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.

Original language	English
Pages (from-to)	1049-1052
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	78
Issue number	7
DOIs	https://doi.org/10.1007/s00339-003-2154-0
Publication status	Published - 1 Jan 2004

ASJC Scopus subject areas

General Chemistry
General Materials Science

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10.1007/s00339-003-2154-0

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title = "Characteristics of BaxSr1-xTiO3thin films grown by pulsed laser ablation of rotating split targets of BaTiO3and SrTiO3",

abstract = "We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.",

author = "V. Ruckenbauer and Hau, {F. F.} and Lu, {S. G.} and Yeung, {K. M.} and Mak, {Chee Leung} and Wong, {K. H.}",

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AU - Ruckenbauer, V.

AU - Hau, F. F.

AU - Lu, S. G.

AU - Yeung, K. M.

AU - Mak, Chee Leung

AU - Wong, K. H.

PY - 2004/1/1

Y1 - 2004/1/1

N2 - We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.

AB - We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.

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DO - 10.1007/s00339-003-2154-0

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JO - Applied Physics A: Materials Science and Processing

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Characteristics of Ba_xSr_1-xTiO₃thin films grown by pulsed laser ablation of rotating split targets of BaTiO₃and SrTiO₃

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