Characteristics of BaxSr1-xTiO3thin films grown by pulsed laser ablation of rotating split targets of BaTiO3and SrTiO3

V. Ruckenbauer, F. F. Hau, S. G. Lu, K. M. Yeung, Chee Leung Mak, K. H. Wong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

12 Citations (Scopus)


We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x = 0.2, 0.5, 0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST∥(100)LSMO∥(100)LAOhas also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x = 0.7. P-E loop analyses of the Ba0.7Sr0.3TiO3and Ba0.8Sr0.2TiO3films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.
Original languageEnglish
Pages (from-to)1049-1052
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Issue number7
Publication statusPublished - 1 Jan 2004

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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