Catalytic chemical vapor deposition of vertically aligned carbon nanotubes on iron nanoislands formed from Fe+-implanted SiO2films

Xing Zhao Ding, L. Huang, X. T. Zeng, Shu Ping Lau, B. K. Tay, W. Y. Cheung, S. P. Wong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)


The catalytic chemical vapor deposition of vertically aligned carbon nanotubes (CNT) using ultrafine iron islands was investigated. The CNTs were produced on silica surface by annealing the Fe-implanted SiO2film. The surface morphology of the annealed samples was investigated under ambient conditions by a Nanoscope III scanning atomic force microscopy in the non-contact tapping and lift modes. The area density of the iron islands was controlled by the annealing conditions. With higher density of the iron islands, perfect alignment of the CNTs were obtained due to a crowding effect.
Original languageEnglish
Pages (from-to)3030-3033
Number of pages4
Issue number14
Publication statusPublished - 1 Jan 2004
Externally publishedYes


  • A. Carbon nanotubes
  • B. Chemical vapor deposition, Implantation, Raman spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)

Cite this