The catalytic chemical vapor deposition of vertically aligned carbon nanotubes (CNT) using ultrafine iron islands was investigated. The CNTs were produced on silica surface by annealing the Fe-implanted SiO2film. The surface morphology of the annealed samples was investigated under ambient conditions by a Nanoscope III scanning atomic force microscopy in the non-contact tapping and lift modes. The area density of the iron islands was controlled by the annealing conditions. With higher density of the iron islands, perfect alignment of the CNTs were obtained due to a crowding effect.
- A. Carbon nanotubes
- B. Chemical vapor deposition, Implantation, Raman spectroscopy
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