Behavior of a movable electrode in piezo-response mode of an atomic force microscope

C. H. Xu, C. H. Woo, San-Qiang Shi, Y. Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

5 Citations (Scopus)

Abstract

The effect of the movable electrode on a piezoelectric-induced (PEI) image was discussed. By applying dc voltage between the movable electrode and the Pt bottom electrode, local polarization was induced on a lead zirconate titanate (PZT) thin film using an atomic force spectroscopy. A PEI image was obtained in the second pass in piezo-response mode where sample surface was scanned by applying ac voltage between the AFM tip and Pt bottom electrode at the sample displacement. It was shown that PEI images of various sample displacement were obtained and analyzed using force-sample displacement curves.
Original languageEnglish
Pages (from-to)8431-8435
Number of pages5
JournalJournal of Applied Physics
Volume95
Issue number12
DOIs
Publication statusPublished - 15 Jun 2004

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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