Automated parallel microassembly for MEMS application

This paper presents the automation of a parallel microassembly process for the construction of out-of-plane microstructures. Images from two vision systems were utilized to automate the grasping and the insertion of three microparts simultaneously. A modified microgripper design and guiding beams were introduced to minimize the possible shift of the micropart and their effectiveness was confirmed experimentally. Parallel microassembly experiments were conducted with success rates of 93% and 61% for the automatic grasping and insertion, respectively. Orientation shifting, experienced by the microparts during the fracture of the supporting tethers, is the suspected cause of failure.