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Keyphrases
Atomic Force Microscopy
100%
Sputter-deposited
100%
Surface Roughening
100%
TiN Thin Films
100%
Microscopy Study
100%
Surface Growth
66%
Room Temperature
33%
Surface Profile
33%
Scaling Behavior
33%
Growth Behavior
33%
Power Spectrum
33%
Silicon Substrate
33%
Shot Noise
33%
Surface Measurement
33%
Surface Diffusion
33%
Transformation Technique
33%
Scaling Analysis
33%
Smoothing Effect
33%
Roughness Exponent
33%
Height-height Correlation Function
33%
Inverse Fourier Transformation
33%
Linear Growth Model
33%
Growth Exponent
33%
Engineering
Atomic Force Microscopy
100%
Thin Films
100%
Growth Surface
66%
Good Agreement
33%
Surface Profile
33%
Silicon Substrate
33%
Growth Behavior
33%
Room Temperature
33%
Power Spectra
33%
Shot Noise
33%
Surface Kinetics
33%
Fourier Transform
33%
Diffusion
33%
Material Science
Atomic Force Microscopy
100%
Thin Films
100%
Surface Diffusion
33%
Silicon Substrate
33%
Chemical Engineering
Film
100%
Surface Diffusion
33%
Chemical Kinetics Characteristics
33%
Surface Measurement
33%
Fourier Transform
33%
Diffusion
33%