Original language | English |
---|---|
Pages (from-to) | 2169-2170 |
Number of pages | 2 |
Journal | Microsystem Technologies |
Volume | 28 |
Issue number | 10 |
DOIs | |
Publication status | Published - Oct 2022 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering