Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Chaojian Chen; Zhuang Xie; Xiaoling Wei; Zijian Zheng

doi:10.1002/smll.201500796

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Chaojian Chen, Zhuang Xie, Xiaoling Wei, Zijian Zheng

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

15 Citations (Scopus)

Abstract

KGaA, Weinheim. 3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.

Original language	English
Pages (from-to)	6013-6017
Number of pages	5
Journal	Small
Volume	11
Issue number	45
DOIs	https://doi.org/10.1002/smll.201500796
Publication status	Published - 2 Dec 2015

Keywords

3D patterns
metal structures
nanofabrication
polymer brushes
scanning probe lithography

ASJC Scopus subject areas

Biotechnology
Biomaterials
Engineering (miscellaneous)

More information

10.1002/smll.201500796

Cite this

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AU - Xie, Zhuang

AU - Wei, Xiaoling

AU - Zheng, Zijian

PY - 2015/12/2

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AB - KGaA, Weinheim. 3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.

KW - 3D patterns

KW - metal structures

KW - nanofabrication

KW - polymer brushes

KW - scanning probe lithography

UR - https://www.scopus.com/pages/publications/84949496314

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DO - 10.1002/smll.201500796

M3 - Journal article

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ER -

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Abstract

Keywords

ASJC Scopus subject areas

More information

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