Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Chaojian Chen, Zhuang Xie, Xiaoling Wei, Zijian Zheng

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)

Abstract

KGaA, Weinheim. 3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.
Original languageEnglish
Pages (from-to)6013-6017
Number of pages5
JournalSmall
Volume11
Issue number45
DOIs
Publication statusPublished - 2 Dec 2015

Keywords

  • 3D patterns
  • metal structures
  • nanofabrication
  • polymer brushes
  • scanning probe lithography

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Engineering (miscellaneous)

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