Application of rigorous diffraction theory to scanning optical microscope problems

S. P. Morgan, Michael Geoffrey Somekh, C. W. See

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

A method of modelling the response of a range of different scanning optical microscope systems using rigorous diffraction theory is illustrated. Considered is the response of conventional, confocal and heterodyne phase microscopes for a range of structures, including metals and magnetic materials. The effect of the phase underestimating the height of the structure at high numerical aperture is demonstrated and results are found to compare well with experimental data. Defocusing effects for the different microscopes are also demonstrated.
Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics Europe - Technical Digest
PublisherIEEE
Pages204
Number of pages1
Publication statusPublished - 1 Jan 1998
Externally publishedYes
EventProceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 - Glasgow, United Kingdom
Duration: 14 Sep 199818 Sep 1998

Conference

ConferenceProceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98
CountryUnited Kingdom
CityGlasgow
Period14/09/9818/09/98

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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