Abstract
A method of modelling the response of a range of different scanning optical microscope systems using rigorous diffraction theory is illustrated. Considered is the response of conventional, confocal and heterodyne phase microscopes for a range of structures, including metals and magnetic materials. The effect of the phase underestimating the height of the structure at high numerical aperture is demonstrated and results are found to compare well with experimental data. Defocusing effects for the different microscopes are also demonstrated.
Original language | English |
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Title of host publication | Conference on Lasers and Electro-Optics Europe - Technical Digest |
Publisher | IEEE |
Pages | 204 |
Number of pages | 1 |
Publication status | Published - 1 Jan 1998 |
Externally published | Yes |
Event | Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 - Glasgow, United Kingdom Duration: 14 Sept 1998 → 18 Sept 1998 |
Conference
Conference | Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 |
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Country/Territory | United Kingdom |
City | Glasgow |
Period | 14/09/98 → 18/09/98 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering