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Application of deep trench LISA technology on optical switch fabrication
Qingxin Zhang
, Jing Li
, Yubo Miao
,
Aiqun Liu
Research output
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Journal article publication
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Conference article
›
Academic research
›
peer-review
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Keyphrases
Optical Switch
100%
Accelerometer Technology
100%
Deep Trench
100%
Trench Etching
75%
Oxides
50%
Microstructure
25%
Process Issues
25%
Singapore
25%
Coating Process
25%
Optical Characteristics
25%
Free Metal
25%
Sidewall
25%
Silicon Substrate
25%
Driving Voltage
25%
DC Bias
25%
Metal Layer
25%
Dielectric Characteristics
25%
Surface Reflectance
25%
Breakdown Voltage
25%
Light Reflectance
25%
Optical Mirror
25%
Mirror Surface
25%
Mask-free
25%
Metal Coatings
25%
High Aspect Ratio Trenches
25%
Surface Improvement
25%
Engineering
Optical Switch
100%
Voltage Driving
25%
Key Process
25%
Side Wall
25%
Silicon Substrate
25%
Metal Layer
25%
Dielectrics
25%
High Aspect Ratio
25%
Breakdown Voltage
25%
Reflectance
25%