Anti-vibration characteristics of a lateral shear interferometer for on-machine surface measurement

X. Liu, Y. Gao, Suet To, Wing Bun Lee

Research output: Journal article publicationJournal articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.
Original languageEnglish
Pages (from-to)411-416
Number of pages6
JournalKey Engineering Materials
Volume295-296
Publication statusPublished - 1 Dec 2005

Keywords

  • On-machine measurement
  • Shear interferometer
  • Surface measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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