Abstract
A miniature Fabry-Perot interferometric acoustic sensor with an ultra-high pressure sensitivity was constructed by using approximately 13 layers of graphene film as the diaphragm. The extremely thin diaphragm was transferred onto the endface of a ferrule, which had an inner diameter of 125 μm, and van der Waals interactions between the graphene diaphragm and its substrate created a low finesse Fabry-Perot interferometer with a cavity length of 98 μm. Acoustic testing demonstrated a pressure-induced deflection of 2380 nm kPa-1and a noise equivalent acoustic signal level of ∼2.7 mPa/Hz1/2for a 3 dB bandwidth with a center frequency of 15 kHz. The sensor also exhibited a dynamic frequency response between 1 and 20 kHz, which conformed well to the result obtained by a reference microphone. The use of a suspended graphene diaphragm has potential applications in highly sensitive pressure/acoustic sensors.
Original language | English |
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Article number | 085101 |
Journal | Measurement Science and Technology |
Volume | 26 |
Issue number | 8 |
DOIs | |
Publication status | Published - 1 Aug 2015 |
Keywords
- acoustic pressure sensor
- Fabry-Perot interference
- graphene diaphragm
- ultra-high sensitivity
ASJC Scopus subject areas
- Instrumentation
- Engineering (miscellaneous)
- Applied Mathematics