Analyzing the applicability of miniature ultra-high sensitivity Fabry-Perot acoustic sensor using a nanothick graphene diaphragm

Cheng Li, Xiangyang Gao, Tingting Guo, Jun Xiao, Shangchun Fan, Wei Jin

Research output: Journal article publicationJournal articleAcademic researchpeer-review

30 Citations (Scopus)


A miniature Fabry-Perot interferometric acoustic sensor with an ultra-high pressure sensitivity was constructed by using approximately 13 layers of graphene film as the diaphragm. The extremely thin diaphragm was transferred onto the endface of a ferrule, which had an inner diameter of 125 μm, and van der Waals interactions between the graphene diaphragm and its substrate created a low finesse Fabry-Perot interferometer with a cavity length of 98 μm. Acoustic testing demonstrated a pressure-induced deflection of 2380 nm kPa-1and a noise equivalent acoustic signal level of ∼2.7 mPa/Hz1/2for a 3 dB bandwidth with a center frequency of 15 kHz. The sensor also exhibited a dynamic frequency response between 1 and 20 kHz, which conformed well to the result obtained by a reference microphone. The use of a suspended graphene diaphragm has potential applications in highly sensitive pressure/acoustic sensors.
Original languageEnglish
Article number085101
JournalMeasurement Science and Technology
Issue number8
Publication statusPublished - 1 Aug 2015


  • acoustic pressure sensor
  • Fabry-Perot interference
  • graphene diaphragm
  • ultra-high sensitivity

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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