Abstract
The finite-difference time-domain (FDTD) method is extended to analyze surface acoustic wave (SAW) filter fabricated on an anisotropic substrate. In this method, the partial derivatives of quasi-static Maxwell's equations and equation of motion are discretized to centered finite-differences. The spatial layout of the field components of this study differs from that of the isotropic case. The current two-dimensional spatial layout needs two components on particle velocity and electrical field nodes, three components on a stress node, in contrast to the isotropic case which requires one component on a particle velocity node, and one or two components on a stress node. Furthermore, the perfectly matched layer (PML) boundary condition is applied to reduce the spurious reflections. The proposed method is used to analyze the frequency response of a SAW filter fabricated on a Y-Z lithium tantalate (LiTaO3) substrate.
Original language | English |
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Title of host publication | 2006 IEEE International Ultrasonics Symposium, IUS |
Pages | 96-99 |
Number of pages | 4 |
Volume | 1 |
DOIs | |
Publication status | Published - 1 Dec 2006 |
Event | 2006 IEEE International Ultrasonics Symposium, IUS - Vancouver, BC, Canada Duration: 3 Oct 2006 → 6 Oct 2006 |
Conference
Conference | 2006 IEEE International Ultrasonics Symposium, IUS |
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Country/Territory | Canada |
City | Vancouver, BC |
Period | 3/10/06 → 6/10/06 |
Keywords
- Anisotropic substrate
- FDTD method
- Surface acoustic wave filter
ASJC Scopus subject areas
- Acoustics and Ultrasonics