Analysis of a MOS integrated gas sensor using a surface chemistry based model

Roy C.C. Li, Philip Ching Ho Chan, Peter W. Cheung

Research output: Journal article publicationJournal articleAcademic researchpeer-review

8 Citations (Scopus)

Abstract

To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2sensor, the NH3sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.
Original languageEnglish
Pages (from-to)233-242
Number of pages10
JournalSensors and Actuators: B. Chemical
Volume28
Issue number3
DOIs
Publication statusPublished - 1 Jan 1995
Externally publishedYes

Keywords

  • Gas adsorption model
  • MOSFET sensors
  • Noise analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry
  • Electrical and Electronic Engineering

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