Analysis of a MOS integrated gas sensor using a surface chemistry based model

Roy C.C. Li; Philip Ching Ho Chan; Peter W. Cheung

doi:10.1016/0925-4005(95)01722-4

Analysis of a MOS integrated gas sensor using a surface chemistry based model

Roy C.C. Li, Philip Ching Ho Chan, Peter W. Cheung

Research output: Journal article publication › Journal article › Academic research › peer-review

11 Citations (Scopus)

Abstract

To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2sensor, the NH3sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

Original language	English
Pages (from-to)	233-242
Number of pages	10
Journal	Sensors and Actuators: B. Chemical
Volume	28
Issue number	3
DOIs	https://doi.org/10.1016/0925-4005(95)01722-4
Publication status	Published - 1 Jan 1995
Externally published	Yes

Keywords

Gas adsorption model
MOSFET sensors
Noise analysis

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/0925-4005(95)01722-4

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@article{951d4e82402f4e0bb98c8edd0ce49637,

title = "Analysis of a MOS integrated gas sensor using a surface chemistry based model",

abstract = "To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2sensor, the NH3sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.",

keywords = "Gas adsorption model, MOSFET sensors, Noise analysis",

author = "Li, {Roy C.C.} and Chan, {Philip Ching Ho} and Cheung, {Peter W.}",

year = "1995",

month = jan,

day = "1",

doi = "10.1016/0925-4005(95)01722-4",

language = "English",

volume = "28",

pages = "233--242",

journal = "Sensors and Actuators: B. Chemical",

issn = "0925-4005",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Analysis of a MOS integrated gas sensor using a surface chemistry based model

AU - Li, Roy C.C.

AU - Chan, Philip Ching Ho

AU - Cheung, Peter W.

PY - 1995/1/1

Y1 - 1995/1/1

N2 - To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2sensor, the NH3sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

AB - To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2sensor, the NH3sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

KW - Gas adsorption model

KW - MOSFET sensors

KW - Noise analysis

UR - http://www.scopus.com/inward/record.url?scp=0029369856&partnerID=8YFLogxK

U2 - 10.1016/0925-4005(95)01722-4

DO - 10.1016/0925-4005(95)01722-4

M3 - Journal article

SN - 0925-4005

VL - 28

SP - 233

EP - 242

JO - Sensors and Actuators: B. Chemical

JF - Sensors and Actuators: B. Chemical

IS - 3

ER -

Analysis of a MOS integrated gas sensor using a surface chemistry based model

Abstract

Keywords

ASJC Scopus subject areas

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