Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler

H. W. Chow; Chow Norbert Cheung; Wei Jin

doi:10.1049/iet-smt.2010.0011

Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler

H. W. Chow
, Chow Norbert Cheung
, Wei Jin

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

2 Citations (Scopus)

Abstract

This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.

Original language	English
Pages (from-to)	237-245
Number of pages	9
Journal	IET Science, Measurement and Technology
Volume	4
Issue number	5
DOIs	https://doi.org/10.1049/iet-smt.2010.0011
Publication status	Published - 1 Sept 2010

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1049/iet-smt.2010.0011

Cite this

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title = "Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler",

abstract = "This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.",

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AU - Chow, H. W.

AU - Cheung, Chow Norbert

AU - Jin, Wei

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Y1 - 2010/9/1

N2 - This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.

AB - This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.

UR - https://www.scopus.com/pages/publications/79251537499

U2 - 10.1049/iet-smt.2010.0011

DO - 10.1049/iet-smt.2010.0011

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Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler

Abstract

ASJC Scopus subject areas

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