Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler

H. W. Chow, Chow Norbert Cheung, Wei Jin

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.
Original languageEnglish
Pages (from-to)237-245
Number of pages9
JournalIET Science, Measurement and Technology
Volume4
Issue number5
DOIs
Publication statusPublished - 1 Sep 2010

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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