An on-chip opto-mechanical accelerometer

B. Dong; H. Cai; J. M. Tsai; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2013.6474323

An on-chip opto-mechanical accelerometer

B. Dong, H. Cai, J. M. Tsai, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

19 Citations (Scopus)

Abstract

Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	641-644
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474323
Publication status	Published - Jan 2013
Externally published	Yes
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan Duration: 20 Jan 2013 → 24 Jan 2013

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan
City	Taipei
Period	20/01/13 → 24/01/13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2013.6474323

Cite this

@inproceedings{23e5f3b16b5c4d409933a54cfc135565,

title = "An on-chip opto-mechanical accelerometer",

abstract = "Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.",

author = "B. Dong and H. Cai and Tsai, {J. M.} and Kwong, {D. L.} and Liu, {A. Q.}",

year = "2013",

month = jan,

doi = "10.1109/MEMSYS.2013.6474323",

language = "English",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "641--644",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Dong, B, Cai, H, Tsai, JM, Kwong, DL & Liu, AQ 2013, An on-chip opto-mechanical accelerometer. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474323, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 641-644, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474323

An on-chip opto-mechanical accelerometer. / Dong, B.; Cai, H.; Tsai, J. M. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 641-644 6474323 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - An on-chip opto-mechanical accelerometer

AU - Dong, B.

AU - Cai, H.

AU - Tsai, J. M.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2013/1

Y1 - 2013/1

N2 - Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.

AB - Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.

UR - http://www.scopus.com/inward/record.url?scp=84875448610&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2013.6474323

DO - 10.1109/MEMSYS.2013.6474323

M3 - Conference article published in proceeding or book

AN - SCOPUS:84875448610

SN - 9781467356558

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 641

EP - 644

BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

An on-chip opto-mechanical accelerometer

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