An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces

Chunjin Wang; Zili Zhang; Chi Fai Cheung; Lai Ting Ho

An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces

Chunjin Wang (Corresponding Author), Zili Zhang, Chi Fai Cheung, Lai Ting Ho

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

Various kinds of functional three dimensional (3D) structured surfaces have been widely used in different fields, such as imaging and illumination. However, the machining process of these kinds of structured surfaces usually leaves tool marks, burs, debris and defects on the structured surface. Currently, it is still a challenging problem to remove those defects so as to further improve the surface quality effectively for better functional performance. In this paper, a maskless fluid jet polishing (MFJP) method is presented which attempts to address this challenge. In MFJP, low pressure micro abrasive water jet slurry is impinged on the structured surface to achieve tiny material removal without using a mask. A series of experiments were conducted on the polishing of different kinds of 3D structured surfaces that are pre-shaped by different machining processes. The surface quality in terms of surface roughness, form
maintainability, and surface smoothness of lens array surface and cylindrical array surface were analysed. The results indicate that the MFJP can significantly improve the surface quality of these kinds of 3D structured surfaces, while possessing high form maintainability under certain conditions. It has the potential to become a competitive method for the precision polishing of 3D structured surfaces. This study also sheds some light on the application of MFJP for polishing other kinds of surfaces with small or
micrometre scale cavities or channels, such as microfluidic chips, high end mould inserts with complicated cavities, etc.

Original language	English
Title of host publication	Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology
Publisher	euspen
Pages	ecopy
Number of pages	4
Publication status	Published - 3 Jun 2022

Publication series

Name	Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology

Keywords

Ultra‐precision machining
mould
structured surface
finishing
fluid jet polishing

More information

Cite this

Wang, C., Zhang, Z., Cheung, C. F., & Ho, L. T. (2022). An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces. In Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology (pp. ecopy). (Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology). euspen. https://www.euspen.eu/knowledge-base/ICE22122.pdf

Wang, Chunjin ; Zhang, Zili ; Cheung, Chi Fai et al. / An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces. Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology. euspen, 2022. pp. ecopy (Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology).

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title = "An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces",

abstract = "Various kinds of functional three dimensional (3D) structured surfaces have been widely used in different fields, such as imaging and illumination. However, the machining process of these kinds of structured surfaces usually leaves tool marks, burs, debris and defects on the structured surface. Currently, it is still a challenging problem to remove those defects so as to further improve the surface quality effectively for better functional performance. In this paper, a maskless fluid jet polishing (MFJP) method is presented which attempts to address this challenge. In MFJP, low pressure micro abrasive water jet slurry is impinged on the structured surface to achieve tiny material removal without using a mask. A series of experiments were conducted on the polishing of different kinds of 3D structured surfaces that are pre-shaped by different machining processes. The surface quality in terms of surface roughness, formmaintainability, and surface smoothness of lens array surface and cylindrical array surface were analysed. The results indicate that the MFJP can significantly improve the surface quality of these kinds of 3D structured surfaces, while possessing high form maintainability under certain conditions. It has the potential to become a competitive method for the precision polishing of 3D structured surfaces. This study also sheds some light on the application of MFJP for polishing other kinds of surfaces with small ormicrometre scale cavities or channels, such as microfluidic chips, high end mould inserts with complicated cavities, etc.",

keywords = "Ultra‐precision machining, mould, structured surface, finishing, fluid jet polishing",

author = "Chunjin Wang and Zili Zhang and Cheung, {Chi Fai} and Ho, {Lai Ting}",

note = "The work described in this paper was mainly supported by a grant from the Guangdong Natural Science Foundation Program 2019-2020 (Project No.: 2019A1515012015) and Research Grants Council of the Government of the Hong Kong Special Administrative Region, China (Project No. 15200119) and a grant from International Partnership Scheme of the Bureau of the International Scientific Cooperation of the Chinese Academy of Sciences (Project No.: 181722KYSB20180015). In addition, the authors would also like to express their sincere thanks to the funding support from the Research Office of The Hong Kong Polytechnic University for the research studentships (Project codes: RK3M)",

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Wang, C, Zhang, Z, Cheung, CF & Ho, LT 2022, An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces. in Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology. Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology, euspen, pp. ecopy. <https://www.euspen.eu/knowledge-base/ICE22122.pdf>

An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces. / Wang, Chunjin (Corresponding Author); Zhang, Zili; Cheung, Chi Fai et al.

Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology. euspen, 2022. p. ecopy (Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces

AU - Wang, Chunjin

AU - Zhang, Zili

AU - Cheung, Chi Fai

AU - Ho, Lai Ting

N1 - The work described in this paper was mainly supported by a grant from the Guangdong Natural Science Foundation Program 2019-2020 (Project No.: 2019A1515012015) and Research Grants Council of the Government of the Hong Kong Special Administrative Region, China (Project No. 15200119) and a grant from International Partnership Scheme of the Bureau of the International Scientific Cooperation of the Chinese Academy of Sciences (Project No.: 181722KYSB20180015). In addition, the authors would also like to express their sincere thanks to the funding support from the Research Office of The Hong Kong Polytechnic University for the research studentships (Project codes: RK3M)

PY - 2022/6/3

Y1 - 2022/6/3

N2 - Various kinds of functional three dimensional (3D) structured surfaces have been widely used in different fields, such as imaging and illumination. However, the machining process of these kinds of structured surfaces usually leaves tool marks, burs, debris and defects on the structured surface. Currently, it is still a challenging problem to remove those defects so as to further improve the surface quality effectively for better functional performance. In this paper, a maskless fluid jet polishing (MFJP) method is presented which attempts to address this challenge. In MFJP, low pressure micro abrasive water jet slurry is impinged on the structured surface to achieve tiny material removal without using a mask. A series of experiments were conducted on the polishing of different kinds of 3D structured surfaces that are pre-shaped by different machining processes. The surface quality in terms of surface roughness, formmaintainability, and surface smoothness of lens array surface and cylindrical array surface were analysed. The results indicate that the MFJP can significantly improve the surface quality of these kinds of 3D structured surfaces, while possessing high form maintainability under certain conditions. It has the potential to become a competitive method for the precision polishing of 3D structured surfaces. This study also sheds some light on the application of MFJP for polishing other kinds of surfaces with small ormicrometre scale cavities or channels, such as microfluidic chips, high end mould inserts with complicated cavities, etc.

AB - Various kinds of functional three dimensional (3D) structured surfaces have been widely used in different fields, such as imaging and illumination. However, the machining process of these kinds of structured surfaces usually leaves tool marks, burs, debris and defects on the structured surface. Currently, it is still a challenging problem to remove those defects so as to further improve the surface quality effectively for better functional performance. In this paper, a maskless fluid jet polishing (MFJP) method is presented which attempts to address this challenge. In MFJP, low pressure micro abrasive water jet slurry is impinged on the structured surface to achieve tiny material removal without using a mask. A series of experiments were conducted on the polishing of different kinds of 3D structured surfaces that are pre-shaped by different machining processes. The surface quality in terms of surface roughness, formmaintainability, and surface smoothness of lens array surface and cylindrical array surface were analysed. The results indicate that the MFJP can significantly improve the surface quality of these kinds of 3D structured surfaces, while possessing high form maintainability under certain conditions. It has the potential to become a competitive method for the precision polishing of 3D structured surfaces. This study also sheds some light on the application of MFJP for polishing other kinds of surfaces with small ormicrometre scale cavities or channels, such as microfluidic chips, high end mould inserts with complicated cavities, etc.

KW - Ultra‐precision machining

KW - mould

KW - structured surface

KW - finishing

KW - fluid jet polishing

M3 - Conference article published in proceeding or book

T3 - Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology

SP - ecopy

BT - Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology

PB - euspen

ER -

Wang C, Zhang Z, Cheung CF, Ho LT. An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces. In Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology. euspen. 2022. p. ecopy. (Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology).

An Investigation of Maskless Fluid Jet Polishing of Three Dimensional Structured Surfaces

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