An investigation of form compensation in fabricating microlens arrays by ultra-precision fast-tool-servo technology

Tsz Chun Kwok, Suet To, Chi Fai Cheung, Su Juan Wang, Wing Bun Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)


Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system - SOP. The form error was successfully reduced after implementation of tool compensation.
Original languageEnglish
Title of host publicationAdvances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China
Number of pages4
Publication statusPublished - 1 Dec 2006
Event12th International Manufacturing Conference in China, IMCC2006 - Xi'an, China
Duration: 21 Sep 200623 Sep 2006

Publication series

NameMaterials Science Forum
ISSN (Print)0255-5476


Conference12th International Manufacturing Conference in China, IMCC2006


  • Fast tool servo
  • Form accuracy
  • Microlens arrays
  • Optimal cutting conditions
  • Surface roughness
  • Tool compensation
  • Ultra-precision machining

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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