@inproceedings{44f87891708b429db452c6c450705b8e,
title = "An investigation of form compensation in fabricating microlens arrays by ultra-precision fast-tool-servo technology",
abstract = "Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system - SOP. The form error was successfully reduced after implementation of tool compensation.",
keywords = "Fast tool servo, Form accuracy, Microlens arrays, Optimal cutting conditions, Surface roughness, Tool compensation, Ultra-precision machining",
author = "Kwok, {Tsz Chun} and Suet To and Cheung, {Chi Fai} and Wang, {Su Juan} and Lee, {Wing Bun}",
year = "2006",
month = dec,
day = "1",
language = "English",
isbn = "0878494219",
series = "Materials Science Forum",
pages = "689--692",
booktitle = "Advances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China",
note = "12th International Manufacturing Conference in China, IMCC2006 ; Conference date: 21-09-2006 Through 23-09-2006",
}