An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li; Andrew Whye Keong Fong; Huanhuan Wang; Leh Woon Lim; Landobasa Y.M. Tobing; Yun Da Chua; Linfang Xu; Weiguo Chen; Qingxin Zhang; Hong Cai; Qi Jie Wang; Lennon Yao Ting Lee

doi:10.1117/12.2649536

An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y.M. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

Microelectromechanical system (MEMS)-based thermal emitter is a key component in an optical sensor to provide broadband emission at mid-infrared wavelengths, where a lot of molecules have their unique absorption profile. However, the thermal emission from a MEMS emitter is typically fixed at a specific spatial coordinate. In this work, a MEMS thermal emitter with piezoelectric actuation to realize active tuning is demonstrated. Thermal emission comes from a doped silicon layer acting as a resistive heater. Piezoelectric actuation is enabled by an aluminum nitride layer on a designed cantilever. The devices are fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible process line. The fabricated thermal emitter at the tip of the cantilever generates broadband MIR thermal emission with spectrum peaked around 10 µm wavelength, and piezoelectric actuation with a displacement of more than 20 μm. The work paves the way towards self-adaptable MEMS directional emitter for various applications including chemical/gas sensing.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems XXII
Editors	Hans Zappe, Wibool Piyawattanametha, Wibool Piyawattanametha, Yong-Hwa Park
Publisher	SPIE
ISBN (Electronic)	9781510659735
DOIs	https://doi.org/10.1117/12.2649536
Publication status	Published - Mar 2023
Externally published	Yes
Event	MOEMS and Miniaturized Systems XXII 2023 - San Francisco, United States Duration: 30 Jan 2023 → 31 Jan 2023

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12434
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	MOEMS and Miniaturized Systems XXII 2023
Country/Territory	United States
City	San Francisco
Period	30/01/23 → 31/01/23

Keywords

MEMS
piezoelectric actuation
thermal emitter

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

More information

10.1117/12.2649536

Cite this

Li, N., Fong, A. W. K., Wang, H., Lim, L. W., Tobing, L. Y. M., Chua, Y. D., Xu, L., Chen, W., Zhang, Q., Cai, H., Wang, Q. J., & Lee, L. Y. T. (2023). An integrated MEMS thermal emitter with piezoelectric actuation. In H. Zappe, W. Piyawattanametha, W. Piyawattanametha, & Y.-H. Park (Eds.), MOEMS and Miniaturized Systems XXII Article 124340T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12434). SPIE. https://doi.org/10.1117/12.2649536

@inproceedings{58a2ef56f90947d28a11dd3ef783a8c9,

title = "An integrated MEMS thermal emitter with piezoelectric actuation",

abstract = "Microelectromechanical system (MEMS)-based thermal emitter is a key component in an optical sensor to provide broadband emission at mid-infrared wavelengths, where a lot of molecules have their unique absorption profile. However, the thermal emission from a MEMS emitter is typically fixed at a specific spatial coordinate. In this work, a MEMS thermal emitter with piezoelectric actuation to realize active tuning is demonstrated. Thermal emission comes from a doped silicon layer acting as a resistive heater. Piezoelectric actuation is enabled by an aluminum nitride layer on a designed cantilever. The devices are fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible process line. The fabricated thermal emitter at the tip of the cantilever generates broadband MIR thermal emission with spectrum peaked around 10 µm wavelength, and piezoelectric actuation with a displacement of more than 20 μm. The work paves the way towards self-adaptable MEMS directional emitter for various applications including chemical/gas sensing.",

keywords = "MEMS, piezoelectric actuation, thermal emitter",

author = "Nanxi Li and Fong, {Andrew Whye Keong} and Huanhuan Wang and Lim, {Leh Woon} and Tobing, {Landobasa Y.M.} and Chua, {Yun Da} and Linfang Xu and Weiguo Chen and Qingxin Zhang and Hong Cai and Wang, {Qi Jie} and Lee, {Lennon Yao Ting}",

note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; MOEMS and Miniaturized Systems XXII 2023 ; Conference date: 30-01-2023 Through 31-01-2023",

year = "2023",

month = mar,

doi = "10.1117/12.2649536",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Hans Zappe and Wibool Piyawattanametha and Wibool Piyawattanametha and Yong-Hwa Park",

booktitle = "MOEMS and Miniaturized Systems XXII",

address = "United States",

}

Li, N, Fong, AWK, Wang, H, Lim, LW, Tobing, LYM, Chua, YD, Xu, L, Chen, W, Zhang, Q, Cai, H, Wang, QJ & Lee, LYT 2023, An integrated MEMS thermal emitter with piezoelectric actuation. in H Zappe, W Piyawattanametha, W Piyawattanametha & Y-H Park (eds), MOEMS and Miniaturized Systems XXII., 124340T, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12434, SPIE, MOEMS and Miniaturized Systems XXII 2023, San Francisco, United States, 30/01/23. https://doi.org/10.1117/12.2649536

An integrated MEMS thermal emitter with piezoelectric actuation. / Li, Nanxi; Fong, Andrew Whye Keong; Wang, Huanhuan et al.
MOEMS and Miniaturized Systems XXII. ed. / Hans Zappe; Wibool Piyawattanametha; Wibool Piyawattanametha; Yong-Hwa Park. SPIE, 2023. 124340T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12434).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - An integrated MEMS thermal emitter with piezoelectric actuation

AU - Li, Nanxi

AU - Fong, Andrew Whye Keong

AU - Wang, Huanhuan

AU - Lim, Leh Woon

AU - Tobing, Landobasa Y.M.

AU - Chua, Yun Da

AU - Xu, Linfang

AU - Chen, Weiguo

AU - Zhang, Qingxin

AU - Cai, Hong

AU - Wang, Qi Jie

AU - Lee, Lennon Yao Ting

PY - 2023/3

Y1 - 2023/3

N2 - Microelectromechanical system (MEMS)-based thermal emitter is a key component in an optical sensor to provide broadband emission at mid-infrared wavelengths, where a lot of molecules have their unique absorption profile. However, the thermal emission from a MEMS emitter is typically fixed at a specific spatial coordinate. In this work, a MEMS thermal emitter with piezoelectric actuation to realize active tuning is demonstrated. Thermal emission comes from a doped silicon layer acting as a resistive heater. Piezoelectric actuation is enabled by an aluminum nitride layer on a designed cantilever. The devices are fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible process line. The fabricated thermal emitter at the tip of the cantilever generates broadband MIR thermal emission with spectrum peaked around 10 µm wavelength, and piezoelectric actuation with a displacement of more than 20 μm. The work paves the way towards self-adaptable MEMS directional emitter for various applications including chemical/gas sensing.

AB - Microelectromechanical system (MEMS)-based thermal emitter is a key component in an optical sensor to provide broadband emission at mid-infrared wavelengths, where a lot of molecules have their unique absorption profile. However, the thermal emission from a MEMS emitter is typically fixed at a specific spatial coordinate. In this work, a MEMS thermal emitter with piezoelectric actuation to realize active tuning is demonstrated. Thermal emission comes from a doped silicon layer acting as a resistive heater. Piezoelectric actuation is enabled by an aluminum nitride layer on a designed cantilever. The devices are fabricated on a complementary metal-oxide semiconductor (CMOS)-compatible process line. The fabricated thermal emitter at the tip of the cantilever generates broadband MIR thermal emission with spectrum peaked around 10 µm wavelength, and piezoelectric actuation with a displacement of more than 20 μm. The work paves the way towards self-adaptable MEMS directional emitter for various applications including chemical/gas sensing.

KW - MEMS

KW - piezoelectric actuation

KW - thermal emitter

UR - http://www.scopus.com/inward/record.url?scp=85159774603&partnerID=8YFLogxK

U2 - 10.1117/12.2649536

DO - 10.1117/12.2649536

M3 - Conference article published in proceeding or book

AN - SCOPUS:85159774603

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems XXII

A2 - Zappe, Hans

A2 - Piyawattanametha, Wibool

A2 - Park, Yong-Hwa

PB - SPIE

T2 - MOEMS and Miniaturized Systems XXII 2023

Y2 - 30 January 2023 through 31 January 2023

ER -

An integrated MEMS thermal emitter with piezoelectric actuation

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

More information

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