An integrated gas sensor technology using surface micro-machining

Philip Ching Ho Chan; G. Z. Yan; L. Y. Sheng; R. K. Sharma; Z. Tang; J. K O Sin; I. M. Hsing; Y. Wang

An integrated gas sensor technology using surface micro-machining

Philip Ching Ho Chan, G. Z. Yan, L. Y. Sheng, R. K. Sharma, Z. Tang, J. K O Sin, I. M. Hsing, Y. Wang

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

11 Citations (Scopus)

Abstract

We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.

Original language	English
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages	543-546
Number of pages	4
Publication status	Published - 1 Jan 2001
Externally published	Yes
Event	14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: 21 Jan 2001 → 25 Jan 2001

Conference

Conference	14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
Country/Territory	Switzerland
City	Interlaken
Period	21/01/01 → 25/01/01

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Mechanical Engineering

Cite this

@inproceedings{10ee3f6864f84bbb97faa91d87a0b38d,

title = "An integrated gas sensor technology using surface micro-machining",

abstract = "We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.",

author = "Chan, {Philip Ching Ho} and Yan, {G. Z.} and Sheng, {L. Y.} and Sharma, {R. K.} and Z. Tang and Sin, {J. K O} and Hsing, {I. M.} and Y. Wang",

year = "2001",

month = jan,

day = "1",

language = "English",

pages = "543--546",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

note = "14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) ; Conference date: 21-01-2001 Through 25-01-2001",

}

TY - GEN

T1 - An integrated gas sensor technology using surface micro-machining

AU - Chan, Philip Ching Ho

AU - Yan, G. Z.

AU - Sheng, L. Y.

AU - Sharma, R. K.

AU - Tang, Z.

AU - Sin, J. K O

AU - Hsing, I. M.

AU - Wang, Y.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.

AB - We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.

UR - http://www.scopus.com/inward/record.url?scp=0034998699&partnerID=8YFLogxK

M3 - Conference article published in proceeding or book

SP - 543

EP - 546

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

T2 - 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)

Y2 - 21 January 2001 through 25 January 2001

ER -

An integrated gas sensor technology using surface micro-machining

Abstract

Conference

ASJC Scopus subject areas

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