An integrated gas sensor technology using surface micro-machining

Philip Ching Ho Chan, G. Z. Yan, L. Y. Sheng, R. K. Sharma, Z. Tang, J. K O Sin, I. M. Hsing, Y. Wang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

11 Citations (Scopus)

Abstract

We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.
Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages543-546
Number of pages4
Publication statusPublished - 1 Jan 2001
Externally publishedYes
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
Duration: 21 Jan 200125 Jan 2001

Conference

Conference14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
Country/TerritorySwitzerland
CityInterlaken
Period21/01/0125/01/01

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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