An integrated gas sensor technology using surface micro-machining

Philip Ching Ho Chan, Gui Zhen Yan, Lie Yi Sheng, Rajnish K. Sharma, Zhenan Tang, Johnny K.O. Sin, I. Ming Hsing, Yangyuan Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

67 Citations (Scopus)

Abstract

We report the first silicon based integrated gas sensor technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micro-machined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas sensor application. Integrated gas sensors with sensitivity down to 1ppm of carbon monoxide were demonstrated using this technology. This approach has been extended to integrated gas sensor array.
Original languageEnglish
Article number4200
Pages (from-to)277-283
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume82
Issue number2-3
DOIs
Publication statusPublished - 1 Jan 2002
Externally publishedYes

Keywords

  • Carbon monoxide sensor
  • Gas sensor
  • Integrated sensor
  • Micro-hotplate
  • Surface micro-machine

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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