Abstract
Micro-cracks in tin oxide thin film may cause bad stability to the micro-hotplate (MHP) gas sensor, especially at high operation temperature or in moisture ambience. In order to reduce micro-cracks, tin oxide thin films on a 2 × 2 MHP gas sensor array are patterned as narrow strips. It is proved by SEM that micro-cracks induced by thermal stress can be greatly restrained in narrow strip shape films comparing with the traditional rectangle board film. Stability of the MHP sensors with narrow strip films was characterized by testing their resistance in air for 60 h, and their responses respectively to methane and carbon monoxide for 300 h. The results show that the strip shape SnO2films are really helpful to enhance stability of the MHP gas sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 346-352 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 139 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 4 Jun 2009 |
| Externally published | Yes |
Keywords
- Micro-crack
- Micro-gas sensor
- Micro-hotplate
- Tin oxide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry