Keyphrases
Adhesion
100%
Silicon Substrate
100%
DLC Coating
100%
Compressive Stress
75%
Friction Coefficient
50%
Film Thickness
50%
Factor Analysis
50%
Stress Coefficient
50%
Operational Parameters
25%
Adhesive Strength
25%
Coating Thickness
25%
Stress Increment
25%
Raman Studies
25%
Linear Relationship
25%
Diamond-like
25%
Dominant Effect
25%
Direct Impact
25%
Substrate Bias
25%
Carbon Coating
25%
Interfacial Stress
25%
Scratch Test
25%
Load Increase
25%
Statistical Software
25%
Floating Condition
25%
Material Science
Film Thickness
100%
Silicon
100%
Coefficient of Friction
100%
Diamond-Like Carbon Coating
50%
Film
50%
Engineering
Silicon Substrate
100%
Critical Load
100%
Compressive Stress
37%
Coefficient of Friction
25%
Structural Parameter
12%
Linear Relationship
12%
Critical Thickness
12%
Floating Condition
12%
Substrate Bias
12%
Adhesive Strength
12%
Diamond-Like Carbon
12%
Coating Thickness
12%