An effective method to increase sensitivity and stability of the integrated gas sensor with sensing film annealing at higher temperature

Gui Zhen Yan, Philip Ching Ho Chan, J. K.O. Sin, I. Ming Hsing, Yang Yuan Wang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Fingerprint

Dive into the research topics of 'An effective method to increase sensitivity and stability of the integrated gas sensor with sensing film annealing at higher temperature'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering