An autostereoscopy-based three-dimensional metrology system for precision measurement of V-groove microstructured surfaces

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper presents the development of an autostereoscopy-based three-dimensional (3D) metrology system for performing precision measurement of V-groove microstructured surfaces. The raw 3D information of the target surfaces is acquired in a single snapshot through a CCD camera and a micro lens array (MLA). The 3D digital model of the target surface with the measuring data is precisely reconstructed through a system- Associated direct extraction of disparity information (DEDI) method since the error is eliminated by statistical analysis used in the method. The development of the autostereoscopy-based 3D measuring method is specifically analysed in this paper. As the kind of micro-structure which brings a lot of challenges to various measuring devices, a series of measurement experiments has been conducted on the v-groove microstructured surfaces. The results show that the autostereoscopy-based 3D metrology system is capable of measuring v-groove microstructured surfaces under different measuring environments with sub-micrometre measuring repeatability. The compactness of the proposed metrology system offers the potentials of performing in-situ measurement.
Original languageEnglish
Title of host publicationProceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Publishereuspen
ISBN (Electronic)9780956679086
Publication statusPublished - 1 Jan 2016
Event16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 - University of Nottingham, Nottingham, United Kingdom
Duration: 30 May 20163 Jun 2016

Conference

Conference16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Country/TerritoryUnited Kingdom
CityNottingham
Period30/05/163/06/16

Keywords

  • Autostereoscopy
  • Disparity patter
  • Microstructured surfaces
  • Precision metrology
  • V-groove

ASJC Scopus subject areas

  • Materials Science(all)
  • Environmental Engineering
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Instrumentation

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