An autostereoscopy-based three-dimensional metrology system for precision measurement of V-groove microstructured surfaces

This paper presents the development of an autostereoscopy-based three-dimensional (3D) metrology system for performing precision measurement of V-groove microstructured surfaces. The raw 3D information of the target surfaces is acquired in a single snapshot through a CCD camera and a micro lens array (MLA). The 3D digital model of the target surface with the measuring data is precisely reconstructed through a system- Associated direct extraction of disparity information (DEDI) method since the error is eliminated by statistical analysis used in the method. The development of the autostereoscopy-based 3D measuring method is specifically analysed in this paper. As the kind of micro-structure which brings a lot of challenges to various measuring devices, a series of measurement experiments has been conducted on the v-groove microstructured surfaces. The results show that the autostereoscopy-based 3D metrology system is capable of measuring v-groove microstructured surfaces under different measuring environments with sub-micrometre measuring repeatability. The compactness of the proposed metrology system offers the potentials of performing in-situ measurement.