An all optical shock sensor based on buckled doubly-clamped silicon beam

B. Dong; J. G. Huang; H. Cai; P. Kropelnicki; A. B. Randles; Y. D. Gu; A. Q. Liu

doi:10.1109/MEMSYS.2014.6765735

An all optical shock sensor based on buckled doubly-clamped silicon beam

B. Dong, J. G. Huang, H. Cai, P. Kropelnicki, A. B. Randles, Y. D. Gu, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

In this paper, an all optical shock sensor based on a buckled doubly-clamped silicon beam is demonstrated. A buckled silicon beam is in the middle of two ring resonator and it has two stable positions. The silicon beam encounters a snap-through process upon a shock force, which can be monitored by measuring the resonance wavelength of the ring resonators. During experiment, a 0.15 nm wavelength is observed for a > 50 g shock. It has merits such as fast response, low power consumption and immunity to electromagnetic interference. It can be applied to inertial navigation system and automotive industry.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	692-695
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765735
Publication status	Published - Jan 2014
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 26 Jan 2014 → 30 Jan 2014

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	26/01/14 → 30/01/14

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2014.6765735

Cite this

Dong, B., Huang, J. G., Cai, H., Kropelnicki, P., Randles, A. B., Gu, Y. D., & Liu, A. Q. (2014). An all optical shock sensor based on buckled doubly-clamped silicon beam. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 692-695). Article 6765735 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765735

Dong, B. ; Huang, J. G. ; Cai, H. et al. / An all optical shock sensor based on buckled doubly-clamped silicon beam. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 692-695 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "In this paper, an all optical shock sensor based on a buckled doubly-clamped silicon beam is demonstrated. A buckled silicon beam is in the middle of two ring resonator and it has two stable positions. The silicon beam encounters a snap-through process upon a shock force, which can be monitored by measuring the resonance wavelength of the ring resonators. During experiment, a 0.15 nm wavelength is observed for a > 50 g shock. It has merits such as fast response, low power consumption and immunity to electromagnetic interference. It can be applied to inertial navigation system and automotive industry.",

author = "B. Dong and Huang, {J. G.} and H. Cai and P. Kropelnicki and Randles, {A. B.} and Gu, {Y. D.} and Liu, {A. Q.}",

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month = jan,

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language = "English",

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series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

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Dong, B, Huang, JG, Cai, H, Kropelnicki, P, Randles, AB, Gu, YD & Liu, AQ 2014, An all optical shock sensor based on buckled doubly-clamped silicon beam. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765735, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 692-695, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765735

An all optical shock sensor based on buckled doubly-clamped silicon beam. / Dong, B.; Huang, J. G.; Cai, H. et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 692-695 6765735 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - In this paper, an all optical shock sensor based on a buckled doubly-clamped silicon beam is demonstrated. A buckled silicon beam is in the middle of two ring resonator and it has two stable positions. The silicon beam encounters a snap-through process upon a shock force, which can be monitored by measuring the resonance wavelength of the ring resonators. During experiment, a 0.15 nm wavelength is observed for a > 50 g shock. It has merits such as fast response, low power consumption and immunity to electromagnetic interference. It can be applied to inertial navigation system and automotive industry.

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Dong B, Huang JG, Cai H, Kropelnicki P, Randles AB, Gu YD et al. An all optical shock sensor based on buckled doubly-clamped silicon beam. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 692-695. 6765735. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765735

An all optical shock sensor based on buckled doubly-clamped silicon beam

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