Abstract
Pure-copper nanowires (NWs) were aligned and soldered without using N2as protection gas in the alignment and soldering processes. Unlike other research works that used segmented NWs for easier wetting and connection, this paper demonstrates soldering pure-copper NWs on microelectrodes using triethanolamine as soldering agent in the high-temperature soldering environment. The results of the electrical conductivity measurement show that the contact resistance between the microelectrodes bridged by NWs was remarkably reduced by the nanosoldering. Moreover, the resistance between two electrodes changed from 1.53 × 105to 136 ω. The methods introduced in this paper are anticipated to be useful to nanodevice fabrication.
Original language | English |
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Article number | 6378383 |
Pages (from-to) | 519-526 |
Number of pages | 8 |
Journal | Journal of Microelectromechanical Systems |
Volume | 22 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1 Jan 2013 |
Keywords
- Microelectrodes
- microelectromechanical devices
- microsensors
- soldering
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering