Skip to main navigation Skip to search Skip to main content

Al-recoil implantation into n-type Si using different primary ions

  • H. L. Kwok
  • , W. C. Wong
  • , Siu Chung Wong

Research output: Journal article publication › Journal article › Academic research › peer-review

3   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'Al-recoil implantation into n-type Si using different primary ions'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science

Chemical Engineering