Abstract
This paper reports a design of double micromachined silicon cylindrical prisms separated by a thin air gap to enable fast thermo-optic switching. The fabricated structure has obtained an extinction ratio of 29.8 dB. This design is advantageous over conventional micromechanical switches for the absence of mechanical stability problems. The use of total internal reflection significantly enhances the sensitivity of switching to small refractive index change of only 5.2×10-3, which allows an on-off switching at 2.2 μs by localized heating through a thermal resistor patterned on top of the prism.
Original language | English |
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Title of host publication | TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems |
Pages | 2409-2412 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 1 Dec 2007 |
Externally published | Yes |
Event | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 |
Conference
Conference | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 |
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Country/Territory | France |
City | Lyon |
Period | 10/06/07 → 14/06/07 |
Keywords
- Cylindrical prisms
- Optical switch
- Thermo-optic effect
- Total internal reflection
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering