Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications

Micro-structured functional surfaces have achieved widespread applications in various advanced scientific, technological, industrial, and engineered fields due to their excellent performances, which are vitally limited by their feasible fabrication. Currently, ultra-precision machining, typically including ultra-precision diamond turning, ultra-precision diamond milling, ultra-precision diamond scratching, ultra-precision grinding, and ultra-precision polishing, is developed as a very-promising solution for the micro-structured functional surface fabrication with high quality, high efficiency, high flexibility, and low cost. Therefore, this paper aims to briefly review the current state of the art in the investigation into ultra-precision machining characteristics of micro-structured functional surfaces with a focus on their typical advanced applications as the significant achievements of their ultra-precision machining fabrication, discuss the key challenges, and further provide new insights into ultra-precision machining of micro-structured functional surfaces for the future research and their further advanced applications.