Advanced fiber optical switches using deep RIE (DRIE) fabrication

J. Li, Q. X. Zhang, A. Q. Liu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

108 Citations (Scopus)

Abstract

Optical switch is widely used in the optical fibre communication networks. This paper described an advanced microelectromechanical systems (MEMS) optical switch that consists of actuator, suspension beam, micromirror, and fiber grooves using deep RIE (DRIE) etching fabrication process. Based on the specification and design requirements of optical switch, the DRIE etching fabrication process is combined with the anisotropic and isotropic, the two different types of etching methods that improve the surface roughness of the micro mirror. Net structure with arcs is introduced to obtain a good release and microloading effect is used and prevented trickily. As a result, promising performances of the optical switch such as low driving voltage of 30 V, low insertion loss, fast switching speed of less than 100 μs and high reliable operation of more than 20 million cycles are achieved. The actuator of the optical switch enables to the delivery of a moving displacement which is as large as 45 μm. This MEMS optical switch has a broad applications for fibre optical communication systems such as n × n optical crossconnects (OXCs), variable optical attenuator (VOA), etc.

Original languageEnglish
Pages (from-to)286-295
Number of pages10
JournalSensors and Actuators, A: Physical
Volume102
Issue number3
DOIs
Publication statusPublished - 1 Jan 2003
Externally publishedYes

Keywords

  • DRIE
  • Fiber optical communication
  • MEMS
  • Optical switch
  • OXCs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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