Active switching of surface plasmon polariton using MEMS actuators

Xuming Zhang; W. M. Zhu; H. Cai; A. Q. Liu

doi:10.1109/MEMSYS.2008.4443772

Active switching of surface plasmon polariton using MEMS actuators

Xuming Zhang, W. M. Zhu, H. Cai, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	778-781
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443772
Publication status	Published - 29 Aug 2008
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	13/01/08 → 17/01/08

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

More information

10.1109/MEMSYS.2008.4443772

Cite this

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title = "Active switching of surface plasmon polariton using MEMS actuators",

abstract = "This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.",

author = "Xuming Zhang and Zhu, \{W. M.\} and H. Cai and Liu, \{A. Q.\}",

year = "2008",

month = aug,

day = "29",

doi = "10.1109/MEMSYS.2008.4443772",

language = "English",

isbn = "9781424417933",

pages = "778--781",

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note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

}

Zhang, X, Zhu, WM, Cai, H & Liu, AQ 2008, Active switching of surface plasmon polariton using MEMS actuators. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443772, pp. 778-781, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 13/01/08. https://doi.org/10.1109/MEMSYS.2008.4443772

Active switching of surface plasmon polariton using MEMS actuators. / Zhang, Xuming; Zhu, W. M.; Cai, H. et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 778-781 4443772.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Cai, H.

AU - Liu, A. Q.

PY - 2008/8/29

Y1 - 2008/8/29

N2 - This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.

AB - This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.

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DO - 10.1109/MEMSYS.2008.4443772

M3 - Conference article published in proceeding or book

SN - 9781424417933

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BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems

T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson

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ER -

Active switching of surface plasmon polariton using MEMS actuators

Abstract

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