Active switching of surface plasmon polariton using MEMS actuators

Xuming Zhang, W. M. Zhu, H. Cai, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.
Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages778-781
Number of pages4
DOIs
Publication statusPublished - 29 Aug 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/TerritoryUnited States
CityTucson, AZ
Period13/01/0817/01/08

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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