Abstract
This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2-μm wide and 40-nm thick patterned on a silicon substrate through a SiO2 layer. This is the first attempt to realize active switching function of SPP and would help push the SPP from physical study to applicable devices.
Original language | English |
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Title of host publication | MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems |
Pages | 778-781 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 29 Aug 2008 |
Externally published | Yes |
Event | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008 |
Conference
Conference | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson |
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Country/Territory | United States |
City | Tucson, AZ |
Period | 13/01/08 → 17/01/08 |
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering