Active scalable elastomer mold to ease demolding of high aspect ratio micro features

Yan Xu, Kai Leung Yung, Hang Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

To fabricate high aspect ratio micro/nano features, demolding is more challenging than filling of melt into micro mold as solidified micro features can be easily peeled off when demolding resistance is high. Besides using anti-stick agent, using deformable mold is a new solution proposed by the authors. This paper presents a setup for testing the deformable active mold. Experimental results on micro thermal molding with the developed mold deforming system prove that the new system can successfully demold high aspect ratio micro features that cannot be produced with traditional metal mold.
Original languageEnglish
Title of host publicationManufacturing Engineering and Automation II
Pages880-883
Number of pages4
DOIs
Publication statusPublished - 19 Dec 2012
Event2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012 - Guangzhou, China
Duration: 16 Nov 201218 Nov 2012

Publication series

NameAdvanced Materials Research
Volume591-593
ISSN (Print)1022-6680

Conference

Conference2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012
CountryChina
CityGuangzhou
Period16/11/1218/11/12

Keywords

  • Active mold
  • Elastomer mold
  • High aspect ratio
  • Microfeature
  • Shape memory driven

ASJC Scopus subject areas

  • Engineering(all)

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