To fabricate high aspect ratio micro/nano features, demolding is more challenging than filling of melt into micro mold as solidified micro features can be easily peeled off when demolding resistance is high. Besides using anti-stick agent, using deformable mold is a new solution proposed by the authors. This paper presents a setup for testing the deformable active mold. Experimental results on micro thermal molding with the developed mold deforming system prove that the new system can successfully demold high aspect ratio micro features that cannot be produced with traditional metal mold.
|Name||Advanced Materials Research|
|Conference||2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012|
|Period||16/11/12 → 18/11/12|
- Active mold
- Elastomer mold
- High aspect ratio
- Shape memory driven