A two-plane-parallel fixed electrodes micromachined tunable oscillator

Y. C. Loke; A. Q. Liu; K. M. Liew; Q. Zou

doi:10.1117/12.425368

A two-plane-parallel fixed electrodes micromachined tunable oscillator

Y. C. Loke, A. Q. Liu, K. M. Liew, Q. Zou

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

Original language	English
Pages (from-to)	430-437
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4408
DOIs	https://doi.org/10.1117/12.425368
Publication status	Published - Apr 2001
Externally published	Yes
Event	Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France Duration: 25 Apr 2001 → 27 Apr 2001

Keywords

Bandpass filter
RF MEMS
Superheterodyne receiver and tunable oscillators

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

More information

10.1117/12.425368

Cite this

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title = "A two-plane-parallel fixed electrodes micromachined tunable oscillator",

abstract = "High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.",

keywords = "Bandpass filter, RF MEMS, Superheterodyne receiver and tunable oscillators",

author = "Loke, \{Y. C.\} and Liu, \{A. Q.\} and Liew, \{K. M.\} and Q. Zou",

year = "2001",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Loke, Y. C.

AU - Liu, A. Q.

AU - Liew, K. M.

AU - Zou, Q.

PY - 2001/4

Y1 - 2001/4

N2 - High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

AB - High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

KW - Bandpass filter

KW - RF MEMS

KW - Superheterodyne receiver and tunable oscillators

UR - https://www.scopus.com/pages/publications/0034866618

U2 - 10.1117/12.425368

DO - 10.1117/12.425368

M3 - Conference article

AN - SCOPUS:0034866618

SN - 0277-786X

VL - 4408

SP - 430

EP - 437

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Y2 - 25 April 2001 through 27 April 2001

ER -

A two-plane-parallel fixed electrodes micromachined tunable oscillator

Abstract

Keywords

ASJC Scopus subject areas

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