Abstract
A tunable bandstop filter applying the capacitive change of micromachined switches is designed, simulated and fabricated. The filter is realized by incorporating electromagnetic bandgap structures with the micromachined switches. These micromachined switches are used as high contrast capacitive elements between the coplanar waveguide ground plane and the signal line to tune the frequency. A new approach for finding the propagation characteristic of the periodic micromachined switches is determined by the dispersion behavior. Different types of parametric analysis are also investigated for the micromachined switches. The surface micromachining fabrication process is employed on the high resistivity silicon substrate to fabricate the filter. The measurement results for the tunable bandstop filter reveal a tuning range from 19 GHz to 17.3 GHz. The lower passband insertion loss is 0.7-2.2 dB and the 20 dB rejection bandwidth is 5.5 GHz.
| Original language | English |
|---|---|
| Pages (from-to) | 851-861 |
| Number of pages | 11 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 16 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1 Apr 2006 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering