A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation

Keyphrases

• 3D Positioning 50%
• Actuation 50%
• Analytical Model 50%
• Compliant Joint 50%
• Control Scheme 50%
• Controller Design 50%
• Decoupling Property 50%
• Derived Model 50%
• Displacement Amplifier 50%
• Feedback Control 50%
• Finite Element Analysis 50%
• Flexure 100%
• Flexure Hinge 50%
• Flexure-based 50%
• Hysteresis Behavior 50%
• Input-output Decoupling 50%
• Integrated Displacement 50%
• Inverse Model 50%
• Kinematics 50%
• Mechanism Design 50%
• Model-based Feedforward 50%
• Nanomanipulation 100%
• Nanopositioning Stage 100%
• Non-axisymmetric 50%
• Nonlinearity 50%
• Parallel Kinematics 50%
• Parallelogram Flexure 100%
• Particle Swarm Optimization 50%
• Performance Test 50%
• Piezo-actuated Stage 50%
• Piezo-driven 100%
• Piezoelectric Actuation 50%
• Prandtl-Ishlinskii Model 50%
• Submicron Accuracy 50%
• Transverse Stiffness 50%
• Two Dimensional 50%
• Two-degree-of-freedom 50%

Engineering

• Actuation 50%
• Amplifier 25%
• Analytical Model 25%
• Control Scheme 25%
• Controller Design 25%
• Decoupling Property 25%
• Design Process 25%
• Development Process 25%
• Experimental Result 25%
• Feedback Control Systems 25%
• Feedforward 25%
• Finite Element Method 25%
• Flexure 100%
• Flexure Hinge 25%
• Joints (Structural Components) 25%
• Nonlinearity 25%
• Optimal Design 25%
• Particle Swarm Optimization 25%
• Performance Test 25%
• Piezoelectric 25%
• Two Degree of Freedom 25%
• Two Dimensional 25%