A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation

Yangmin Li, Qingsong Xu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

196 Citations (Scopus)


This paper reports the design and development processes of a totally decoupled flexure-based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The uniqueness of the proposed XYZ stage lies in that it possesses both input and output decoupling properties with integrated displacement amplifiers. The input decoupling is realized by actuation isolation using double compound parallelogram flexures with large transverse stiffness, and the output decoupling is implemented by employing two-dimensional (2-D) compound parallelogram flexures. By simplifying each flexure hinge as a two-degree-of-freedom (2-DOF) compliant joint, analytical models of kinematics, statics, and dynamics of the XYZ stage are established and then validated with finite-element analysis (FEA). The derived models are further adopted for optimal design of the stage through particle swarm optimization (PSO), and a prototype of XYZ stage is fabricated for performance tests. The nonsymmetric hysteresis behavior of the piezo-stage is identified with the modified Prandtl-Ishlinskii (MPI) model, and a control scheme combining the inverse model-based feedforward with feedback control is constructed to compensate the plant nonlinearity and uncertainty. Experimental results reveal that a submicron accuracy 1-D and 3-D positioning can be achieved by the system, which confirms the effectiveness of the proposed mechanism and controller design as well.
Original languageEnglish
Article number5595514
Pages (from-to)265-279
Number of pages15
JournalIEEE Transactions on Automation Science and Engineering
Issue number2
Publication statusPublished - 1 Apr 2011
Externally publishedYes


  • Finite-element analysis (FEA)
  • flexure mechanisms
  • mechanism design
  • micro/nanopositioning
  • motion control
  • parallel manipulators
  • piezoelectric hysteresis

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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