A study of the performance of microfabricated electroosmotic pump

J. S. Hu; Christopher Y.H. Chao

doi:10.1016/j.sna.2006.07.007

A study of the performance of microfabricated electroosmotic pump

J. S. Hu, Christopher Y.H. Chao

Research output: Journal article publication › Journal article › Academic research › peer-review

17 Citations (Scopus)

Abstract

Microfabricated planar electroosmotic (EO) pump is an innovative micro pump which promotes chip-level integration in micro devices such as micro cooling and micro combustion systems. A numerical model for this kind of micro pump was established avoiding the use of Boltzmann equation and is able to simulate the performance of the microfabricated EO pump with the depth comparable to the EDL thickness. A fabrication process was designed and several EO micro pump protocols were fabricated successfully. Both experimental and numerical studies were carried out. The results from the experiments and numerical simulation agreed with each other well. The effects of pump depth, fluid temperature, applied voltage and bulk ionic concentration on the pumping performance were studied.

Original language	English
Pages (from-to)	273-282
Number of pages	10
Journal	Sensors and Actuators, A: Physical
Volume	135
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2006.07.007
Publication status	Published - 30 Mar 2007

Keywords

Electrical double layer
Electroosmotic micro pump
Microfabricated
Performance

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

More information

10.1016/j.sna.2006.07.007

Cite this

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AU - Chao, Christopher Y.H.

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AB - Microfabricated planar electroosmotic (EO) pump is an innovative micro pump which promotes chip-level integration in micro devices such as micro cooling and micro combustion systems. A numerical model for this kind of micro pump was established avoiding the use of Boltzmann equation and is able to simulate the performance of the microfabricated EO pump with the depth comparable to the EDL thickness. A fabrication process was designed and several EO micro pump protocols were fabricated successfully. Both experimental and numerical studies were carried out. The results from the experiments and numerical simulation agreed with each other well. The effects of pump depth, fluid temperature, applied voltage and bulk ionic concentration on the pumping performance were studied.

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A study of the performance of microfabricated electroosmotic pump

Abstract

Keywords

ASJC Scopus subject areas

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