A study of pattern and feature analysis of surface generation in fast tool servo machining of optical microstructures

Chi Fai Cheung, X. Q. Jiang, Suet To, Wing Bun Lee, T. C. Kwok, H. F. Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

Nowadays, there are lack of definitive international standards, surface parameters and techniques for the characterisation of the surface generation of optical microstructures with the articulation to their quality specifications in practical applications. This paper presents a study of factors affecting the surface generation in FTS machining of optical microstructures. The surface quality and defects of the machined surfaces are examined by a non-contact interferometric surface profiler. Surface features and patterns are analysed based on power spectrum analysis and are correlated with the surface quality of the optical microstructures. The results form the basis for the development of the pattern and feature analysis algorithms for the characterisation of surface generation in FTS machining of optical microstructures.
Original languageEnglish
Title of host publicationProceedings of the 21st Annual ASPE Meeting, ASPE 2006
Publication statusPublished - 1 Dec 2006
Event21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States
Duration: 15 Oct 200620 Oct 2006

Conference

Conference21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006
Country/TerritoryUnited States
CityMonterey, CA
Period15/10/0620/10/06

Keywords

  • Fast tool servo machining
  • Optical microstructures
  • Pattern and feature analysis
  • Surface characterization
  • Surface generation

ASJC Scopus subject areas

  • Mechanical Engineering

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