Abstract
Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.
| Original language | English |
|---|---|
| Pages (from-to) | 417-421 |
| Number of pages | 5 |
| Journal | Key Engineering Materials |
| Volume | 339 |
| DOIs | |
| Publication status | Published - 20 Mar 2007 |
Keywords
- Advanced optics manufacture
- Freeform surface
- Measurement technology
- Surface characterization
- Ultra-precision machining
ASJC Scopus subject areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering