A study of measurement technology for ultra-precision freeform surfaces

H. F. Li, Chi Fai Cheung, L. B. Kong, Wing Bun Lee, Suet To

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.
Original languageEnglish
Pages (from-to)417-421
Number of pages5
JournalKey Engineering Materials
Volume339
DOIs
Publication statusPublished - 20 Mar 2007

Keywords

  • Advanced optics manufacture
  • Freeform surface
  • Measurement technology
  • Surface characterization
  • Ultra-precision machining

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this