A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

H. Cai; C. W. Chan; C. S. Thian; X. M. Zhang; Chao Lu; A. Q. Liu

doi:10.1109/DTIP.2003.1287011

A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

H. Cai, C. W. Chan, C. S. Thian, X. M. Zhang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is implemented to operate the MEMS VOA. Here, by use of the proportional integral (PI) controlled system, each VOA module implements the functions as an optical power regulator or optical power equalizer. Moreover, this control system ensures the device with leading performance, stability, reliability and speed, but also fast dynamic response. A more attraction of this electronic control system is its programmability.

Original language	English
Title of host publication	DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003
Publisher	IEEE
Pages	75-78
Number of pages	4
ISBN (Electronic)	078037066X, 9780780370661
DOIs	https://doi.org/10.1109/DTIP.2003.1287011
Publication status	Published - 1 Jan 2003
Externally published	Yes
Event	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 - Cannes, France Duration: 5 May 2003 → 7 May 2003

Conference

Conference	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003
Country/Territory	France
City	Cannes
Period	5/05/03 → 7/05/03

Keywords

Control systems
Digital control
Electric variables control
Microelectromechanical systems
Micromechanical devices
Optical attenuators
Optical control
Optical variables control
Pi control
Voltage control

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

More information

10.1109/DTIP.2003.1287011

Cite this

@inproceedings{1fc4957d6c3a4b49b46eb665f2ca51c7,

title = "A study of electronic interface for MEMS Variable Optical Attenuator (VOA)",

abstract = "A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is implemented to operate the MEMS VOA. Here, by use of the proportional integral (PI) controlled system, each VOA module implements the functions as an optical power regulator or optical power equalizer. Moreover, this control system ensures the device with leading performance, stability, reliability and speed, but also fast dynamic response. A more attraction of this electronic control system is its programmability.",

keywords = "Control systems, Digital control, Electric variables control, Microelectromechanical systems, Micromechanical devices, Optical attenuators, Optical control, Optical variables control, Pi control, Voltage control",

author = "H. Cai and Chan, {C. W.} and Thian, {C. S.} and Zhang, {X. M.} and Chao Lu and Liu, {A. Q.}",

year = "2003",

month = jan,

day = "1",

doi = "10.1109/DTIP.2003.1287011",

language = "English",

pages = "75--78",

booktitle = "DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

publisher = "IEEE",

address = "United States",

note = "5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 ; Conference date: 05-05-2003 Through 07-05-2003",

}

Cai, H, Chan, CW, Thian, CS, Zhang, XM, Lu, C & Liu, AQ 2003, A study of electronic interface for MEMS Variable Optical Attenuator (VOA). in DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003., 1287011, IEEE, pp. 75-78, 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003, Cannes, France, 5/05/03. https://doi.org/10.1109/DTIP.2003.1287011

A study of electronic interface for MEMS Variable Optical Attenuator (VOA). / Cai, H.; Chan, C. W.; Thian, C. S. et al.
DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. IEEE, 2003. p. 75-78 1287011.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Cai, H.

AU - Chan, C. W.

AU - Thian, C. S.

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AU - Lu, Chao

AU - Liu, A. Q.

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AB - A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is implemented to operate the MEMS VOA. Here, by use of the proportional integral (PI) controlled system, each VOA module implements the functions as an optical power regulator or optical power equalizer. Moreover, this control system ensures the device with leading performance, stability, reliability and speed, but also fast dynamic response. A more attraction of this electronic control system is its programmability.

KW - Control systems

KW - Digital control

KW - Electric variables control

KW - Microelectromechanical systems

KW - Micromechanical devices

KW - Optical attenuators

KW - Optical control

KW - Optical variables control

KW - Pi control

KW - Voltage control

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A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

Abstract

Conference

Keywords

ASJC Scopus subject areas

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