A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

H. Cai, C. W. Chan, C. S. Thian, X. M. Zhang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


A digital electronics control system design for a Microelectromechanical System (MEMS) Variable Optical Attenuator (VOA) is studied. This MEMS VOA is based on applying voltage to position a moving micro-mirror to control the optical power levels. The digital control system reported in this paper is implemented to operate the MEMS VOA. Here, by use of the proportional integral (PI) controlled system, each VOA module implements the functions as an optical power regulator or optical power equalizer. Moreover, this control system ensures the device with leading performance, stability, reliability and speed, but also fast dynamic response. A more attraction of this electronic control system is its programmability.
Original languageEnglish
Title of host publicationDTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003
Number of pages4
ISBN (Electronic)078037066X, 9780780370661
Publication statusPublished - 1 Jan 2003
Externally publishedYes
Event5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 - Cannes, France
Duration: 5 May 20037 May 2003


Conference5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003


  • Control systems
  • Digital control
  • Electric variables control
  • Microelectromechanical systems
  • Micromechanical devices
  • Optical attenuators
  • Optical control
  • Optical variables control
  • Pi control
  • Voltage control

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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