A Soft Capacitive Pressure Sensor Based on a Liquid Dielectric Layer

  • Meng Zhang
  • , Chengjie Qiu
  • , Jianxiang Wang
  • , Xuan Huang
  • , Wu Zhang
  • , Lip Ket Chin
  • , Wenli Shang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

Soft electronic technology has broad application prospects in biomedical and wearable devices, among others, due to its flexibility, lightweight nature, and biocompatibility. Although various materials and structures have been proposed for pressure sensors based on soft electronic technology, most studies focus on a specific function with fixed sensitivity, lacking tunability to expand the operational range. In this work, we demonstrated a low-cost polydimethylsiloxane (PDMS)-based pressure sensor that can be easily fabricated by laser ablation and mature PDMS fabrication technology. We then employed a liquid solution to serve as the dielectric layer of the pressure sensor. By injecting different liquid solutions, the sensitivity of the capacitive pressure sensor can be easily adjusted. A 2.73-fold increase in sensitivity and excellent sensing linearity with a determination coefficient greater than 0.85 were achieved. The pressure sensor was applied to demonstrate material property measurements and Morse code adaptation. We foresee that the adjustable soft capacitive pressure sensor has extensive applications in wearable devices, material metrology, healthcare point-of-care devices, and other fields.

Original languageEnglish
Article number2700
Pages (from-to)1-12
JournalSensors
Volume25
Issue number9
DOIs
Publication statusPublished - Apr 2025

Keywords

  • adjustable sensitivity
  • capacitive pressure sensor
  • soft electronics

ASJC Scopus subject areas

  • Analytical Chemistry
  • Information Systems
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

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