A silicon micromachined shock accelerometer with twin-mass-plate structure

Keyphrases

• Accelerometer 100%
• Analysis Simulation 33%
• ANSYS Simulation 33%
• Bar System 33%
• Fabrication Methods 33%
• Micromachining 100%
• Natural Frequency 33%
• Plate Structure 100%
• Plate Thickness 33%
• Primary Performance 33%
• Resonant Frequency 66%
• Shock Accelerometers 100%
• Shock Test 33%
• Silicon Micromachining Process 33%
• Under-five 33%

Engineering

• Experimental Result 50%
• Iso 50%
• Micro Machining 50%
• Natural Frequency 50%
• Plate Structure 100%
• Plate Thickness 50%
• Resonance Frequency 100%
• Theoretical Value 50%