A silicon micromachined shock accelerometer with twin-mass-plate structure

Zuankai Wang, Denggang Zong, Deren Lu, Bin Xiong, Xinxin Li, Yuelin Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

30 Citations (Scopus)

Abstract

Presented in this paper, is a shock accelerometer fabricated by silicon micromachining technology. The accelerometer is constructed with an iso-width twin-mass-plate structure that can greatly increase the natural frequency and facilitate the fabrication process. Theoretical analysis and ANSYS simulation of the structure show that it can cover a wide range from 2,000g to 200,000g depending on the thickness of the plate if packaged successfully. The primary performance of the accelerometer was examined using a free dropping-bar system. Experimental results on sensitivity and resonance frequency are presented and compared with the theoretical values. The results of the shock tests show that the accelerometer with a plate thickness of 74 μm has a sensitivity of 1.43 μ-V g-1 under 5 V excitation, and its resonance frequency is greater than 200 kHz.

Original languageEnglish
Pages (from-to)50-56
Number of pages7
JournalSensors and Actuators, A: Physical
Volume107
Issue number1
DOIs
Publication statusPublished - 1 Oct 2003
Externally publishedYes

Keywords

  • Accelerometer
  • Micromachining
  • Piezoresistive
  • Shock

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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