A silicon micromachined shock accelerometer with twin-mass-plate structure

Zuankai Wang; Denggang Zong; Deren Lu; Bin Xiong; Xinxin Li; Yuelin Wang

doi:10.1016/S0924-4247(03)00270-X

A silicon micromachined shock accelerometer with twin-mass-plate structure

Zuankai Wang, Denggang Zong, Deren Lu, Bin Xiong, Xinxin Li, Yuelin Wang

Research output: Journal article publication › Journal article › Academic research › peer-review

33 Citations (Scopus)

Abstract

Presented in this paper, is a shock accelerometer fabricated by silicon micromachining technology. The accelerometer is constructed with an iso-width twin-mass-plate structure that can greatly increase the natural frequency and facilitate the fabrication process. Theoretical analysis and ANSYS simulation of the structure show that it can cover a wide range from 2,000g to 200,000g depending on the thickness of the plate if packaged successfully. The primary performance of the accelerometer was examined using a free dropping-bar system. Experimental results on sensitivity and resonance frequency are presented and compared with the theoretical values. The results of the shock tests show that the accelerometer with a plate thickness of 74 μm has a sensitivity of 1.43 μ-V g^-1 under 5 V excitation, and its resonance frequency is greater than 200 kHz.

Original language	English
Pages (from-to)	50-56
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	107
Issue number	1
DOIs	https://doi.org/10.1016/S0924-4247(03)00270-X
Publication status	Published - 1 Oct 2003
Externally published	Yes

Keywords

Accelerometer
Micromachining
Piezoresistive
Shock

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

More information

10.1016/S0924-4247(03)00270-X

Cite this

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title = "A silicon micromachined shock accelerometer with twin-mass-plate structure",

abstract = "Presented in this paper, is a shock accelerometer fabricated by silicon micromachining technology. The accelerometer is constructed with an iso-width twin-mass-plate structure that can greatly increase the natural frequency and facilitate the fabrication process. Theoretical analysis and ANSYS simulation of the structure show that it can cover a wide range from 2,000g to 200,000g depending on the thickness of the plate if packaged successfully. The primary performance of the accelerometer was examined using a free dropping-bar system. Experimental results on sensitivity and resonance frequency are presented and compared with the theoretical values. The results of the shock tests show that the accelerometer with a plate thickness of 74 μm has a sensitivity of 1.43 μ-V g-1 under 5 V excitation, and its resonance frequency is greater than 200 kHz.",

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author = "Zuankai Wang and Denggang Zong and Deren Lu and Bin Xiong and Xinxin Li and Yuelin Wang",

note = "Funding Information: The authors would like to express their gratitude to Professor M. Bao for many helpful advises and S.Q. Chen for the dynamic test. The work is supported by 973 MOEMS, The Major State Basic Research Program of China (Nos. G1999033101 and G1999033103). ",

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AU - Wang, Zuankai

AU - Zong, Denggang

AU - Lu, Deren

AU - Xiong, Bin

AU - Li, Xinxin

AU - Wang, Yuelin

N1 - Funding Information: The authors would like to express their gratitude to Professor M. Bao for many helpful advises and S.Q. Chen for the dynamic test. The work is supported by 973 MOEMS, The Major State Basic Research Program of China (Nos. G1999033101 and G1999033103).

PY - 2003/10/1

Y1 - 2003/10/1

N2 - Presented in this paper, is a shock accelerometer fabricated by silicon micromachining technology. The accelerometer is constructed with an iso-width twin-mass-plate structure that can greatly increase the natural frequency and facilitate the fabrication process. Theoretical analysis and ANSYS simulation of the structure show that it can cover a wide range from 2,000g to 200,000g depending on the thickness of the plate if packaged successfully. The primary performance of the accelerometer was examined using a free dropping-bar system. Experimental results on sensitivity and resonance frequency are presented and compared with the theoretical values. The results of the shock tests show that the accelerometer with a plate thickness of 74 μm has a sensitivity of 1.43 μ-V g-1 under 5 V excitation, and its resonance frequency is greater than 200 kHz.

AB - Presented in this paper, is a shock accelerometer fabricated by silicon micromachining technology. The accelerometer is constructed with an iso-width twin-mass-plate structure that can greatly increase the natural frequency and facilitate the fabrication process. Theoretical analysis and ANSYS simulation of the structure show that it can cover a wide range from 2,000g to 200,000g depending on the thickness of the plate if packaged successfully. The primary performance of the accelerometer was examined using a free dropping-bar system. Experimental results on sensitivity and resonance frequency are presented and compared with the theoretical values. The results of the shock tests show that the accelerometer with a plate thickness of 74 μm has a sensitivity of 1.43 μ-V g-1 under 5 V excitation, and its resonance frequency is greater than 200 kHz.

KW - Accelerometer

KW - Micromachining

KW - Piezoresistive

KW - Shock

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

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A silicon micromachined shock accelerometer with twin-mass-plate structure

Abstract

Keywords

ASJC Scopus subject areas

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