A robust fully-digital drive for linear permanent magnet synchronous motor

Michael S.W. Tam, Chow Norbert Cheung

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)

Abstract

High-speed and high-precision linear motions are found in many industrial applications, such as the wire-bonding and die-bonding of microelectronic components [1]. In order to achieve the strict requirements of next-generation semiconductor packaging machines, a high-performance linear drive system is developed. The linear drive system consists of a Linear Permanent Magnet Synchronous Motor (LPMSM), and a DSP-based fully digital PWM drive. To increase the current dynamics, overrated momentary high-voltage and high-current are injected to the actuator's coils, through the PWM drive. Finally, to improve the system robustness, a force compensation loop is derived to attain the system dynamic response when load variation is present. This paper describes the development of such a robust linear drive system. The paper includes (i) the construction and modelling of the Permanent Magnet Synchronous Linear Drive (PMSM); (ii) the design of the robust linear drive and the control system; (iii) the hardware implementation of the linear drive system; and (iv) the implementation results. The final results show that the system is capable of maintaining the same motion dynamic with load variation from 1kg to 2kg.
Original languageEnglish
Title of host publication2004 1st International Conference on Power Electronics Systems and Applications Proceedings
Pages188-193
Number of pages6
Publication statusPublished - 1 Dec 2004
Event2004 1st International Conference on Power Electronics Systems and Applications - Hong Kong, Hong Kong
Duration: 9 Nov 200411 Nov 2004

Conference

Conference2004 1st International Conference on Power Electronics Systems and Applications
Country/TerritoryHong Kong
CityHong Kong
Period9/11/0411/11/04

ASJC Scopus subject areas

  • Engineering(all)

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